JPH03128934U - - Google Patents
Info
- Publication number
- JPH03128934U JPH03128934U JP3756690U JP3756690U JPH03128934U JP H03128934 U JPH03128934 U JP H03128934U JP 3756690 U JP3756690 U JP 3756690U JP 3756690 U JP3756690 U JP 3756690U JP H03128934 U JPH03128934 U JP H03128934U
- Authority
- JP
- Japan
- Prior art keywords
- etching chamber
- power supply
- oscillation
- luminescence
- detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 7
- 230000010355 oscillation Effects 0.000 claims description 4
- 238000001020 plasma etching Methods 0.000 claims description 3
- 238000004020 luminiscence type Methods 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3756690U JPH03128934U (en]) | 1990-04-06 | 1990-04-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3756690U JPH03128934U (en]) | 1990-04-06 | 1990-04-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03128934U true JPH03128934U (en]) | 1991-12-25 |
Family
ID=31544799
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3756690U Pending JPH03128934U (en]) | 1990-04-06 | 1990-04-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03128934U (en]) |
-
1990
- 1990-04-06 JP JP3756690U patent/JPH03128934U/ja active Pending
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